Facilities

A glove box (vacuum type)

Gas Purifer System
Removes oxygen and moisture from inert gas to <1 PPM
Pure Create Co.,Ltd.

UV Ozone Cleaner
Laser Techno_UV-253
Film deposition facilities

Parylene coater, Lab.Coater, PDS-2010
JAPAN Parylene(Agency:ThreeBond)

Vacuum Deposition system I

Vacuum Deposition system II

3tagets RF magnetron sputtering system
(Nichiden) Anelva_SPF-332H

RF magnetron sputter
(Nichiden) Anelva_SPF-210

spin coaterー
MIKASA 1H-DXU

Atomic Absorbtion Spectroscopy (AAS) to monitor and control deposition rates(Fix Cs version)LUXTRON(Agency:R-DEC Co.,Ltd.)

LB_film system
Japan Leaser Electronics
Measurement Instruments

Luminance efficiency measurement system for OLED(voltage source、keithley version)
PRECISE GAUGES Co.,Ltd._EL1003

Multi-channel Detector
Hamamatsu Photonics Co.,Ltd._PMA-11

Photoluninace(Fluorescence,phosphorent) Spectrophotometer
HORIBA JOBINYVON_SPEX FluoroMax-P

OLED life-timemeasurement system
EHC

Photo-Electron Spectrometer in Air
Riken_keiki_AC-1

Fermi level measurement system
Riken_keiki_FAC-1

The profilesmeasurement system(STYLUS GAUSE)
Dektak3ST

Riken_keiki_FAC-1(Left)
and McAllister Kelvin Probe [in Air !] (Right_back side)

McAllister Kelvin Probe

McAllister Kelvin Probe

McAllister Kelvin Probe [in Air !]