Facilities
A glove box (vacuum type)
Gas Purifer System
Removes oxygen and moisture from inert gas to <1 PPM
Pure Create Co.,Ltd.
UV Ozone Cleaner
Laser Techno_UV-253
Film deposition facilities
Parylene coater, Lab.Coater, PDS-2010
JAPAN Parylene(Agency:ThreeBond)
Vacuum Deposition system I
Vacuum Deposition system II
3tagets RF magnetron sputtering system
(Nichiden) Anelva_SPF-332H
RF magnetron sputter
(Nichiden) Anelva_SPF-210
spin coaterー
MIKASA 1H-DXU
Atomic Absorbtion Spectroscopy (AAS) to monitor and control deposition rates(Fix Cs version)LUXTRON(Agency:R-DEC Co.,Ltd.)
LB_film system
Japan Leaser Electronics
Measurement Instruments
Luminance efficiency measurement system for OLED(voltage source、keithley version)
PRECISE GAUGES Co.,Ltd._EL1003
Multi-channel Detector
Hamamatsu Photonics Co.,Ltd._PMA-11
Photoluninace(Fluorescence,phosphorent) Spectrophotometer
HORIBA JOBINYVON_SPEX FluoroMax-P
OLED life-timemeasurement system
EHC
Photo-Electron Spectrometer in Air
Riken_keiki_AC-1
Fermi level measurement system
Riken_keiki_FAC-1
The profilesmeasurement system(STYLUS GAUSE)
Dektak3ST
Riken_keiki_FAC-1(Left)
and McAllister Kelvin Probe [in Air !] (Right_back side)
McAllister Kelvin Probe
McAllister Kelvin Probe
McAllister Kelvin Probe [in Air !]