電子画像研究室

Facilities


  • A glove box (vacuum type)

  • Gas Purifer System
    Removes oxygen and moisture from inert gas to <1 PPM
    Pure Create Co.,Ltd.

  • UV Ozone Cleaner
    Laser Techno_UV-253

Film deposition facilities


  • Parylene coater, Lab.Coater, PDS-2010
    JAPAN Parylene(Agency:ThreeBond)

  • Vacuum Deposition system I

  • Vacuum Deposition system II

  • 3tagets RF magnetron sputtering system
    (Nichiden) Anelva_SPF-332H

  • RF magnetron sputter
    (Nichiden) Anelva_SPF-210

  • spin coaterー
    MIKASA 1H-DXU

  • Atomic Absorbtion Spectroscopy (AAS) to monitor and control deposition rates(Fix Cs version)LUXTRON(Agency:R-DEC Co.,Ltd.)

  • LB_film system
    Japan Leaser Electronics

Measurement Instruments


  • Luminance efficiency measurement system for OLED(voltage source、keithley version)
    PRECISE GAUGES Co.,Ltd._EL1003

  • Multi-channel Detector
    Hamamatsu Photonics Co.,Ltd._PMA-11

  • Photoluninace(Fluorescence,phosphorent) Spectrophotometer
    HORIBA JOBINYVON_SPEX FluoroMax-P

  • OLED life-timemeasurement system
    EHC

  • Photo-Electron Spectrometer in Air
    Riken_keiki_AC-1

  • Fermi level measurement system
    Riken_keiki_FAC-1

  • The profilesmeasurement system(STYLUS GAUSE)
    Dektak3ST

  • Riken_keiki_FAC-1(Left)
    and McAllister Kelvin Probe [in Air !] (Right_back side)

  • McAllister Kelvin Probe

  • McAllister Kelvin Probe

  • McAllister Kelvin Probe [in Air !]